InfinityXT增強并擴展了FormFactor行業(yè)領(lǐng)先的Infinity探頭系列，該系列十多年來一直為設(shè)備表征和建模領(lǐng)域的準(zhǔn)確性和可重復(fù)性設(shè)定基準(zhǔn)。隨著市場的發(fā)展，新的 InfinityXT 系列以更高的溫度范圍、更好的探頭可見性和耐用性以及對更窄間距的支持，進一步提升了行業(yè)標(biāo)準(zhǔn)。

最近，在汽車、移動通信/5G和物聯(lián)網(wǎng)設(shè)備市場的推動下，射頻和微波設(shè)備行業(yè)經(jīng)歷了爆炸式增長。新的InfinityXT探針的開發(fā)一直是由這些高增長市場的需求所指導(dǎo)的。這些要求包括設(shè)備建模和表征的超寬帶寬和寬溫度范圍。用于建模的設(shè)備測量是最需要在晶圓上的測量應(yīng)用之一，需要極高的測量精度和可重復(fù)性，因為提取的參數(shù)對非常微小的差異非常敏感。

Features / Benefits

Superior high-frequency and electrical performance	?40 GHz, 50 GHz, 67 GHz and 110 GHz versions available. ? Excellent return and insertion loss combined with low and repeatable contact resistance on aluminum pads. This helps to ensure high-accuracy S-parameter measurements to meet the requirements of the most demanding applications
Full-range thermal coverage	?Performance from -50°C to +175°C, without compromising accuracy or life (demonstrated useable to 200 °C).
Small, lithographic fabricated contacts	? Industry-leading solution for small pad, tight pitch, RF probing needs. Small, lithographically-defined contacts with a contact area of 12 μm W x 5 μm L. When combined with a new mechanical architecture to improve the skate vs overtravel ratio and excellent probe tip visibility for precise probe placement, enables probing of tight pitch, small pads. ? Standard pitches down to 45 μm with the ability to support pitches as small as 25 μm (for pitches <45 μm contact your field sales or applications team to discuss your requirements).
Durable probe structure	? Highly durable, solid rhodium contacts and new mechanical architecture help to provide an RF probe with extremely high durability and long probe life.

Specifications

Mechanical Specifications

Available contact configurations IXT40 - GS /SG/GSG, IXT50 - GS /SG/GSG, IXT67 - GS /SG/GSG, IXT110 GSG Only Recommended

	Available contact pitches	45, 50, 55, 60, 65, 70, 75, 80, 90, 100, 125, 150, 175, 200, 225, and 250 μm (pitches between 25 – 40 μm, contact field sales or applications to discuss your requirements)
	Contact material	Non-oxidizing solid rhodium tips
	Minimum recommended pad size	20 μm x 40 μm (but can be used on small pads in Y, with careful probe placement)
	Contact area	W12 μm x L5 μm (nominally, at initial use, length will extend some with use)
	Operating temperature	-40°C to +175°C (maximum temperature range: -55°C to +200°C)
	Recommended overtravel	30-75 μm
	Maximum safe overtravel	150 μm
	Overtravel to skate ratio	2.5:1 (50 μm overtravel : 20 μm skate)
	Body Styles	IXT40, IXT50 Angled only, IXT67, IXT110 Angled and vertical

S-Parameter Specifications

IXT40 (GSG)	0-20 GHz	20-40 GHz
Return Loss (S11)	20 dB	15 dB

Insertion loss (S12)	0.8 dB	1 dB
IXT40 (GS/SG)	0-20 GHz	20-40 GHz

Return Loss (S11)	20 dB	13 dB
Insertion loss (S12)	0.8 dB	1.2 dB
IXT50 (GSG)	0-20 GHz	20-50 GHz

Return Loss (S11)	20 dB	13 dB
Insertion loss (S12)	1 dB	1.5 dB
IXT50 (GS/SG)	0-20 GHz	20-50 GHz
Return Loss (S11)	20 dB	13 dB
Insertion loss (S12)	1 dB	1.5 dB

IXT67 (GSG)

0-25 GHz

25-40 GHz

40-67 GHz

Return Loss (S11)	20 dB	15 dB	12dB
Insertion loss (S12)	0.8 dB	1 dB	1.5 dB
IXT67 (GS/SG)	0-25 GHz	25-40 GHz	0-67 GHz

Return Loss (S11)	20 dB	13 dB	11 dB
Insertion loss (S12)	0.8 dB	1.2 dB	1.8 dB
IXT110 (GSG)	0-35 GHz	35-80 GHz	80-110 GHz

Return Loss (S11)	20 dB	15 dB	11 dB
Insertion loss (S12)	1 dB	1.5 dB	2 dB

Note: Probe SParameter files “s2p” are available at the following link. You will need the exact PN and SN of the probe to download the s2p file.

Specifications (continued)

DC Specifications: MIscellaneous:

Maximum DC voltage	250 V
Maximum DC current	500 ma
Isolation resistance	200 MΩ
MIscellaneous:
RF signal line connector	Female 50 Ohm coaxial connector on the probe as follows: IXT67 version uses a 1.85mm V style connector IXT110 version uses a 1mm W style connector
Typical contact resistance on Al pads at 25 °C	< 0.05 Ω (< 0.02 Ω on Au pads), Temperature, cleaning material and frequency (as well as many other variables) affect actual contact resistance values. Consult field sales or applications to discuss your requirements.
Maximum RF power handling	> 4 W (20 GHz), 2 W (67 GHz), 1 W (110 GHz)
Physical Dimensions (measurements in inches) InfinityXT angled bodystyle dimensions side view InfinityXT angled bodystyle mounting hole dimensions / topview.

》Contacts/Scrub/Performance Examples

SEM image of InfinityXT 100 μm pitch contacts highlights the highly visible, small 12 μm wide contacts.

InfinityXT GSG-50 scrub marks at progressively higher overtravel levels of 13, 25, 50 and 75 μm. Highly uniform scrub yields very high repeatability in your measurements.

The unique mechanical architecture of the InfinityXT probes provide higher force with less overtravel (OT) during the first 2 mils of over- travel. This helps to ensure that you achieve good contact resistance at lower OT settings, mean less skate and the ability to probe on smaller pads. This same unique architecture enables significantly higher OT levels without damage to the probe as the force levels offat higher levels of overtravel.

Performance Examples (continued)

Typical Insertion Loss thru 110 GHz for a GSG 50 μm ( - spec limit)

Typical Return Loss thru 110 GHz for a GSG 50 μm probe (specifications can vary slightly by pitch; - spec limit)

Performance Examples (continued)

Probe to probe isolation, shown at two separations. The blue curve shows 200 μm probe-to-probe separation and the

green curve shows 500 μm separation.

OrderingInformation

Contact your local sales representative for a price and delivery quotation or help with any questions. You can also request a quote on our website:www.formfactor.com/products/probes/infinityxt

Examples:

IXT67-A-GS-50 is a 67 GHz 1.85 mm connector probe, in a angled connector body style, with GS contacts at a 50 μm pitch

IXT67-A-GS-250 is a 67 GHz 1.85 mm connector probe, in an angled connector body style, with GSG contacts at a 250 μm pitch

Recommended Accessories

PART NUMBER DESCRIPTION

168-690	WinCal, advanced VNA calibration software and analysis tools
RF cables	Many versions and lengths available (dependent on probe body style and system type used) Please consult with your sales representative